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--Fused Silica Substrate |
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--Application |
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¡Ñ Thin Film |
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--Features |
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¡Ñ High insulation performance, Good mechanical strength. |
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--Material Characteristics Table |
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Item |
Unit |
Fused Silica |
Microcrystalline Glass |
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Chemical Formula |
¡ª¡ª |
¡ª¡ª |
SiO2 |
SiO2 |
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Purity |
¡ª¡ª |
% |
99.999 |
98.0~99.2 |
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Density |
¡ª¡ª |
g/cm3 |
2.20 |
2.39 |
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Water Absorptivity |
¡ª¡ª |
% |
0 |
0 |
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Surface Roughness |
Ra |
¦Ìm |
£¼0.010 |
£¼0.012 |
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Color |
¡ª¡ª |
¡ª¡ª |
Colorless, Transparent |
White, Translucent |
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Flexural Strength |
25¡æ |
MPa |
80 |
75 |
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Warping Degree |
25¡æ |
mm/25.4mm |
0.08~0.12 |
£¼0.05 |
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Thermal Conductivity |
25¡æ |
W/m¡¤K |
1.46 |
1.60 |
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Coefficient of Expansion |
20~320¡æ |
1¡Á10e-6/¡æ |
5.50 |
1.00 |
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Dielectric Strength |
¡ª¡ª |
DC,KV/mm |
¡Ý15.0 |
¡Ý10.0 |
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Dielectric Constant |
20¡æ, 1MHz |
¡ª¡ª |
3.83 |
5.76 |
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Dielectric Loss |
20¡æ, 1MHz |
¡ª¡ª |
0.000015 |
0.000030 |
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Bulk Resistivity |
25¡æ |
¦¸¡¤cm |
3.0¡Á10e+14 |
2.0¡Á10e+14 |
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Crystal Form |
¡ª¡ª |
¡ª¡ª |
Amorphous State |
Crystalline State |
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--Size Choice |
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Code |
Type |
T-inch (mm) |
L & W-inch (mm) |
T Tolerance |
Application |
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H |
Fused Silica |
0.010 (0.254) |
2.0*2.0 (50.8*50.8) |
¡À5.0% |
Thick Flim |
| 0.015 (0.381) |
3.0*3.0 (76.2*76.2) |
| 0.020 (0.508) |
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| 0.025 (0.635) |
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I |
Microcrystalline Glass |
0.010 (0.254) |
2.0*2.0 (50.8*50.8) |
¡À5.0% |
Thin Film |
| 0.015 (0.381) |
3.0*3.0 (76.2*76.2) |
| 0.020 (0.508) |
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| 0.025 (0.635) |
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